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MEMSnet Home: MEMS-Talk: MEMS die post-processing...
MEMS die post-processing...
2002-03-21
iog
2002-03-21
Michael D Martin
2002-03-22
Frye Jeffrey-G11523
MEMS die post-processing...
Frye Jeffrey-G11523
2002-03-22
Check out this company. Good luck.
http://www.ptgindustries.com/default.htm

-----Original Message-----
From: iog [mailto:[email protected]]
Sent: Thursday, March 21, 2002 4:52 AM
To: [email protected]
Subject: [mems-talk] MEMS die post-processing...


Hi!

Can anybody give me information on service that provides laser cutting of
MEMS
dies? I need to cut smaller die out of 3*3 mm MEMS die. The MEMS stack is
0.5
mm Si wafer and 0.5 mm anodically bonded glass.

Thank you,

Igor
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