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MEMSnet Home: MEMS-Talk: low stress ( tensile) "LPCVD silicon-nitride"
low stress ( tensile) "LPCVD silicon-nitride"
2002-03-22
Javeed Shaikh Mohammed
2002-03-22
Rick Williston
2002-03-22
Jim Beall
low stress ( tensile) "LPCVD silicon-nitride"
Javeed Shaikh Mohammed
2002-03-22
Hello everyone,

In my fabrication process, I will need to deposit a "LPCVD silicon-nitride"
layer with a tensile stress of ~ 100 MPa. Does any one have the "Process
parameters" for this process.

regards,
javeed shaikh mohammed.






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