Hi Sou Zou-
Through the user programmable interface in MEMS Pro you can output grey scale
masks. If you would like to contact me at MEMSCAP, I can give you more details.
My contact info is 510 444 5269 and my e-mail is [email protected].
Regards,
Mary Ann

sou zou wrote:

> hi mems-talk members !
>
> did someone knows any CAD (computer aided design) tool to make a grey scale
mask (also called half tone mask), for lithography applications and
micromachining ? In fact, I could get access to L-Edit, Mems Pro, Intellisuite
and may be MemsExpert (from Coventor) softwares. And I am wondering if there is
any kind of option provided in these tools, which allow me to make this kind of
gradually toned masks. If not is there any other design tool, which could help
in that matter ?
>
> Thank you everybody for your help.
>
> Sofiane
>
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