Robert,

Please check out our Web site www.evgroup.com 
regarding mask/bond aligners and wafer bonding equipment. We do provide
comprehensive information upon request by e-mail.

Best regards,
Helge


                -----Original Message-----
                From:   Robert Johnstone [mailto:[email protected]]
                Sent:   Thursday, March 21, 2002 5:11 PM
                To:     [email protected]
                Subject:        [mems-talk] Clean room equipment

                Hello Everyone,

                I'm interested in starting a new clean-room from scratch.
Since we have a very
                good idea of the processes we want to run, I decided to
collect information
                about the necessary equipment online.  However, it turns out
that most suppliers
                are very closed-mouthed about the equipment.  I understand
there aren't going to
                quote prices, but I at least want comprehensive information
about floor space
                and required support services (air, vacuum, power, etc.).

                Could someone please point me to a good source for this
information?

                Thank-you,


                ----------------------------------------
                Robert Johnstone
                Simon Fraser University
                http://www.sfu.ca/~rjohnsto/
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