Hi Mighty,
Thank you for your help first!!!
On top of Al, I have deposited polymer Parylene. I guess may be you are
right. I can see that the beam bends. But my problem is that I can see the
beam floating on the solution, with one end fixed on the substrate. I don't
know whether you can understand or not. Let's say, when I shake the bottle
with solution inside, the beam cannot withstand the fuild flow and vibrate
to and fro. In fact, I am not shaking the bottle. I've just pulled the
substrate out. I should say.. the beam will follow the fuild motion. Hope
you can understand. My english is not good enough!!!
Thank you very much!!!!
Yours,
Hoyin
>From: Mighty Platypus
>Reply-To: [email protected]
>To: [email protected]
>Subject: Re: [mems-talk] Sacrifical release
>Date: Tue, 26 Mar 2002 07:22:02 -0800 (PST)
>
>Greetings Chan Ho,
>What you're probably seeing is the result of film stress, not any sort of
>fluid force. You'll probably be able to find some information about stress
>reduction in Madou, Kovacs, Trimmer, or possibly even Maluf. By the way,
>what material are you depositing on top of Aluminum (to make your beams)?
>
>Jesse Fowler
> UCLA/MAE Dept., 420 Westwood Plaza, Room 18-121, ENGR IV
> Los Angeles, CA 90095-1597 | (310)825-3977
>"Battery is safe if not provoked." -- _Batteries in a Portable World_
>
>On Tue, 26 Mar 2002, Chan Ho Yin wrote:
>
> > Hi all,
> >
> > I am a beginner in MEMS field and I am now fabricating a simple
> > cantilever beam. The sacrifical layer is Al (~2um). The beam thickness
is
> > ~0.5um and length is ~500um. When I tried to release the structure
using
> > AZ300 PR developer, I found that the released beam will bent or twist
due
> > to the force caused by the fluid flow (PR developer).
> >
> > Even I hold the sample carefully, the beam still bent or twist when
I
> > tried to pull the sample out of the solution. It can't stand straight.
What
> > should I do? Is there any technique in handling this?? I guess this
might
> > too simple to you. But it is important to me. Can you suggest me with
> > detailed steps? Thank you very much!!!!
> >
> > Yours,
> > Hoyin
> >
> >
> >
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