ACT/EMT 400 stripper from Ashland chemical will remove positive resist without
damaging underlying Cr.  I have also found this stripper very effective in
removing resist burned from RIE processing.

Roger Shile

>>> [email protected] 03/26/02 06:51AM >>>
I am currently trying to commision a TePla 300 Plasma processor for the use
in removing photoresist from devices after RIE but I am left with small
residues which are impossible to remove. What are the best resist removal
conditions and how can the temperature be kept as low as possible? Also is
there any way to strip resist from chrome without removing the chrome as
well.

Mike Tippetts
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