Hi Mike

Pt is difficult to shift by RIE.  You can do it by using an argon plasma and
running at high bias, but the resist gets too hot if you try etching too
fast.  You have to experiment to find how much power you can put in without
frying the resist.

Regards

Martin Walker BSc(Tech) MSc
Tactical Marketing Engineer
Oxford Instruments Plasma Technology
North End, Yatton,
Bristol BS49 4AP  UK
T. +44 (0) 1934 837031
F. +44 (0) 1934 837001
E. 
W. 


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