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MEMSnet Home: MEMS-Talk: Pt anneal on oxide
Pt anneal on oxide
2002-03-29
Michael D Martin
Pt anneal on oxide
Michael D Martin
2002-03-29
I am trying to put down a 1000 angstrom layer of Pt without an adhesion
layer onto spin on oxide. In order to promote adhesion I "baked" the
wafer at 700C for about 2 hours (ramped at 10C/min)  in a tube furnace
with N2 flow of about 0.5 l/min. When the sample came out it look really
bizarre. Instead of the mirror like finish I'd started with, I've got a
hazy transparent layer. I can see the oxide (defects and all). Was the
temp too high? Metal too thin? Help!

Thanks,
    Mike Martin

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