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MEMSnet Home: MEMS-Talk: Experience with STS AOE tool
Experience with STS AOE tool
2002-04-01
neo man
Experience with STS AOE tool
neo man
2002-04-01
Hi everyone,

I'm looking for someone who has experience with
the STS AOE (Advanced Oxide Etch) tool.

In particular, I'm looking for a "starting point"
process for the etching of silicon and doped
SiO2. (in particular for waveguides)

Send email to [email protected] with your
experience and include your phone number if I can
contact you via telephone. We are in the Bay Area.

Thanks in advance,
neoman
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