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MEMSnet Home: MEMS-Talk: Lithography services for 76mm?
Lithography services for 76mm?
2002-04-01
mrousey@tegal.com
2002-04-02
Inna
Lithography services for 76mm?
Inna
2002-04-02
Hi Mark,

It seems like Anvik (the company I work for) can help you. Could you please
provide a detailed description, specifications and, if possible, a drawing
of what you would like us to manufacture.
We have a web site with lots of information, which you might want to check
out: www.anvik.com


Inna Mushkatinskaya

Sr. Process Specialist
Anvik Corporation
6 Skyline Drive
Hawthorne NY 10532

Tel: 914-345-2442, etx.18
Fax: 914-345-2452

Web: www.anvik.com
E-mail: innam@anvik.com



on 4/1/02 1:20 PM, mrousey@tegal.com at mrousey@tegal.com wrote:

> I'm looking for a company that can provide lithography services for 76mm
> (3") InP substrates.  I'd like a via pattern printed using thick (~15um)
> photoresist.  Via size would be ~50um.
>
> Thanks,
>
> Mark R-S

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