Hello Zomy,
You can check out several papers on this subject at:
http://www.evgroup.com/papers/compoundpapers.htm
Best Regards,
Josh Palensky
EV Group
(602) 437-9492
-----Original Message-----
From: Steffan Anon [mailto:[email protected]]
Sent: Wednesday, April 03, 2002 2:29 AM
To: [email protected]
Subject: [mems-talk] Full Wafer Bonding
Hi everyone,
I'm looking for Information about full wafer bonding of 3 inch wafers using
polyimide or SOG (Spin on Glas) as intermediate layer.
We try to bond GaAs to glas with an optical transparent layer that is
resistant to temperatures up to 300 degree celsius.
Best regards
Zomy
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