Hello Keith:

Innovative Micro Technology (IMT) can provide CMP services -- I'll have to
check on 100mm substrates.  Let's talk off-line.

Regards-Monte

>>Keith Miller wrote:
Message: 2
From: "Miller, Keith" < >
To: "'[email protected]'" < >
Date: Wed, 3 Apr 2002 14:24:46 -0500
Subject: [mems-talk]
Reply-To: [email protected]

I know this has been asked many times over the past months, but does anyone
know of a non-university CMP service provider for planarization of blanket
poly-Si and oxide films over patterned 100mm Si substrates? Looking for a
long-term vendor, not one-shot project support.

Now that Prodeo's service doesn't exist, there seems to be a hole in the
market. Anyone out there filling it?

Keith Miller

Microfabrication Process Engineer
JDS Uniphase
>>MEMS Business Unit

Monteith G. Heaton
VP Marketing and Sales
Innovative Micro Technology
75 Robin Hill Road * Santa Barbara, CA  93117
Ph:  805-681-2852 * Fx:  805-967-2677
[email protected] * www.imtmems.com
_________________________________________
"Your strategic partner for MEMS design and 6" wafer
manufacturing services with 0.355m photolithography,
30,000 sq. ft. fab, and non-CMOS materials flexibility,
including metals/magnetics."