AW: mems-talk digest, Vol 1 #244 - 7 msgs: Need help of making
ma sk
Runkel, Frank
2002-04-05
Hello,
this is not a difficult task for a mask maker. You may contact
http://www.image-tec.com. They are offering fast laser writing service and
high flexibility regarding the data format of your mask layout.
Best Regards,
Frank.
--------------------------------------------
SUSS MicroTec
Applications Center Europe
Frank Runkel
Schleissheimer Str. 90
85748 Garching
Germany
Fon +49 89 32007 - 302
Fax +49 89 32007 - 390
email [email protected]
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>
> Message: 3
> Date: Wed, 3 Apr 2002 14:53:41 -0500 (EST)
> From: Peng Yao
> To: [email protected]
> Subject: [mems-talk] Need help of making mask
> Reply-To: [email protected]
>
> Hi,
> I need to fabricate a 3" deep UV (365nm) mask. Does anyone know any
> company who can do this? The feature size we need is 2 micron. My pattern
> is very simple.
> Thanks.
>
> Peng Yao
> DOEs lab
> Electrical Engineering Dept.
> Univeristy of delaware
> Newark D.E 19716
>
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