A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Au solder bonding or Au/Si eutectic bonding
Au solder bonding or Au/Si eutectic bonding
2002-04-04
Dinh Ton
2002-04-09
Dr. Hermann Oppermann
2002-04-08
Maurice Norcott
2002-04-08
Palensky Joshua
Au solder bonding or Au/Si eutectic bonding
Maurice Norcott
2002-04-08
Contact EV group directly at their Arizona Apps. Lab
They should be able to give you some ideas.

-----Original Message-----
From: Dinh Ton [mailto:minhdinh2@yahoo.com]
Sent: Thursday, April 04, 2002 12:49 PM
To: mems-talk@memsnet.org
Subject: [mems-talk] Au solder bonding or Au/Si eutectic bonding


Hi all,

I have a question and hope if someone here can help.

In my process, I normally do an anodic bonding step
near the end to finish off the device - top wafer is
silicon and bottom wafer is glass/Pyrex.  I want to
change the process a bit by replacing the bottom wafer
with a Silicon wafer.  To accomplish this glueing of
the two wafers, I want to perform some kind of Au
solder bonding or Au/Si eutetic bonding on the full
wafer scale.  I wonder if anyone out there doing this
consistently enough to provide some advice.
For Au solder bonding (Au/Sn, for example), or Au/Si
bonding:
how thick of the layers do I need?  barrier layer? In
the EV bonder (or other typical bonder) how much
weight need to apply and at what temperature, and for
how long? How do you go about in preparing your wafers
to get the maximum and consistent bond? Etc...

Thank you,
MD
Yahoo! Tax Center - online filing with TurboTax
http://taxes.yahoo.com/
_______________________________________________
mems-talk@memsnet.org mailing list: to unsubscribe or change your list
options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
Hosted by the MEMS Exchange, providers of MEMS processing services.
Visit us at http://www.mems-exchange.org/

reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Harrick Plasma, Inc.
Addison Engineering
University Wafer
Nano-Master, Inc.