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MEMSnet Home: MEMS-Talk: Spectral emission of argon plasma
Spectral emission of argon plasma
2002-04-05
N. Farrington
2002-04-08
Michael D Martin
2002-04-08
[email protected]
Spectral emission of argon plasma
Michael D Martin
2002-04-08
What region of the spectrum are you interested in? I can tell you that
the spectral features in the DUV-UV depend very much on the plasma's
properties, e.g. electron density, pressure, DC or RF (and frequency)
driving etc..

-Mike


>>> [email protected] 04/05/02 02:43AM >>>
Hi all,

I'm not sure if this is a bit of an obscure one (maybe I should look
for a physics discussion group!!), but does anyone have any
information (or directions to information) on the spectral output of
an argon plasma?

Thanks in advance,

Novak Farrington
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