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MEMSnet Home: MEMS-Talk: Re: uniform of resist on Platinum
Re: uniform of resist on Platinum
2002-04-08
Troy Plattner
Re: uniform of resist on Platinum
Troy Plattner
2002-04-08
Penghui:

There are a million things that can go wrong when
spin-coating PR.  Can you describe your process and
what your surfaces look like (e.g., streaks, dots,
etc.)

Troy Plattner
University of Illinois
Yahoo! Tax Center - online filing with TurboTax
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