Nickolay,
PI can be planerized using CMP. It's tricky, BCB is a bit easier to
planerize.

shay

"Nickolay V. Lavrik" wrote:

> Does any one know if polyimide coatings can be planarized using CMP?
> (I am particularly interested in planarization of 10 to 50 micron thick
> polyimide spun over high aspect ratio geometries).
>
> Any input will be highly appreciated.
>
> Nickolay
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