Dear Mr.Patton,
please check the reference Y.Feng et al., J.Vac.Sci.Technol. A18(2),
730-733 (2000). Here you will also find two more references on
air-bridge fabrication.
Good luck.
Dr. Tatiana Borzenko,
Physikalisches Institut der Universitaet Wuerzburg,
Am Hubland 97074 Wuerzburg Germany

>
>Message: 2
>Date: Thu, 04 Apr 2002 15:44:52 -0500
>To: [email protected]
>From: "Martin O. Patton" 
>Subject: [mems-talk] Metal Air Bridge
>Reply-To: [email protected]
>
>Hi Mems Makers,
>
>Would one of you please refer me to information on the fabrication of air
>bridge contacts?
>
>Thanks very much,
>Marty
>
>Martin O. Patton
>Senior Research Engineer
>Essential Research Incorporated
>6410 Eastland Road
>Cleveland, Ohio 44142
>www.er.com
>(440) 816-9850