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MEMSnet Home: MEMS-Talk: Fractal Gold Surface
Fractal Gold Surface
2002-04-09
Thorsten Uelzen
Fractal Gold Surface
Thorsten Uelzen
2002-04-09
Dear fellow MEMS Researchers,

I am interested in building a rough fractal jagged resp. uniformAu-surface
with an average roughness of approx. 1um and structureswith an aspect ratio
of aprox. 1 - 2. The adhesive layer is Ti. ButI'm not committed about that.
Under the Ti-Au Layer is Si resp. SiO2.
Do you know a process to realize my project. The layer system is
notimportant. I only need structured Gold on the surface and aopportunity to
contact it resp. to isolate it to the ground.
Greetings,
        Thorsten Uelzen        Department of Microsystemtechnology
        Technical University Hamburg-Harburg

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