Bo,
   need a clearer picture of what you are doing or trying to do.  If you can
explain more I may be able to help.  Bill Moffat

-----Original Message-----
From: Bo He [mailto:[email protected]]
Sent: Tuesday, April 09, 2002 9:37 PM
To: [email protected]
Subject: [mems-talk] Bonding problem!


Hi,everyone:

     I am trying to bond PDMS with silicon. I followed the recipe in some
references: cleaning both surfaces with aceton, alcolhol and N2 dry then
using oxygen plasma to treat both surfaces for 1 min. But results are
bad, they cannot be bonded together. Any other recipes I can follow or
some important steps missed in my operation? Please give me some
suggestions.

    Another question is that if developed photoresist can be bonded with
other material by heating up to higher temp (150degreeC)?

Any info is highly appreciated. Thanks.

Bo

------------------------------------------------------------------------

Send and receive Hotmail on your mobile device: Click Here
_______________________________________________
[email protected] mailing list: to unsubscribe or change your list
options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
Hosted by the MEMS Exchange, providers of MEMS processing services.
Visit us at http://www.mems-exchange.org/