There are tools for this purpose. The Jet-etch from B&G in Santa Cruz, CA is
one of them. I believe they use Red Fuming Nitric for plastic packages. A
web search on Jet Etch will get you more details.

Good Luck,

Mark West

-----Original Message-----
From: mems-talk-admin@memsnet.org [mailto:mems-talk-admin@memsnet.org]On
Behalf Of Andrew Cao
Sent: Tuesday, April 09, 2002 3:17 PM
To: mems-talk@memsnet.org
Subject: [mems-talk] removing dies from packages


Hi
I'm trying to remove the dies from a TO-92 pacakge.
Does anyone know of a chemical that can dissove the
plastic package without damaging the die.  Would a
oxyen plasma be able to burn off the plastic.  Thanks
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