fasheng,
        sounds like a problem we had when etching aluminum.  We used a
commercially available tool that applied a vacuum above the etch area and this
pulled the bubbles out of the etch solution as soon as they formed.  bill
Moffat

-----Original Message-----
From: fasheng zhou [mailto:[email protected]]
Sent: Tuesday, April 09, 2002 6:26 PM
To: [email protected]
Subject: [mems-talk] Bubble free in oxide etching


Dear MEMS friends,

I'm trying to eliminate the bubbles in oxide (PSG)
etching by BOE. But I couldn't find any method up
to now. I will really appreciate it if you can
give me some advice.

Thanks.
Yahoo! Tax Center - online filing with TurboTax
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