Hello Kaustubh,

I have had very good success with critical point drying systems. I have
dried 200-micron undimpled cantilevers 2 microns above the substrate
with 100% yield, and I have dried large undimpled structures suspended
by (dimpled) 900-micron crab leg springs with about 70% yield.

I have tried other drying systems as well, and have found critical point
drying to beat the pants off sublimation and alcohol-based drying steps.

I think you'll find that these systems can be used just off the shelf,
as they are exceedingly simple devices (basically just a pressure bomb).
However, they are dangerous, so I do not suggest building your own.

I cannot recommend a vendor (aside from what you could find with an
internet search), as I have been borrowing a system from a biologist at
my institution.

Best Wishes,
Craig McGray
6211 Sudikoff Laboratory
Dartmouth College
Hanover, NH 03755




mems-talk-request@memsnet.org wrote:Message: 7

> Date: Tue, 9 Apr 2002 17:41:48 -0700 (PDT)
> From: kaustubh bhate 
>
> Hi,
> I am looking for critical point dryers to be used in
> doing the Super Critical CO2 release of mems devices.
> Does anybody know of any vendors where I can get them?
> Also does anybody, who has used them, know how
> effective these dryers are in removing stiction and
> how difficult are they to operate.
> Also,can they be used just "as-bought,off the shelf"
> or they also require accessories?
>
> Any information will be highly appreciated.
>
> Thanking You.
> Sincerely,
> Kaustubh Bhate.