If you can control the rate, you might be able to do ion milling.

Henry

David Kelly @memsnet.org on 04/10/2002 10:22:27 AM

Please respond to [email protected]

Sent by:    [email protected]


To:    [email protected]
cc:
Subject:    [mems-talk] etch al2o3



Does someone know how to etch a sputtered layer of Al2O3 without attacking
the
aluminum metal layer underneath?  Note that I am not interested in simply
removing a native oxide layer.  If anyone could give some insight, it would
be
greatly appreciated.

THANKS!
_______________________________________________
[email protected] mailing list: to unsubscribe or change your list
options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
Hosted by the MEMS Exchange, providers of MEMS processing services.
Visit us at http://www.mems-exchange.org/