Dear Bill :
         I am also interested in the subject. What is the tool? What is its
name?
Could you tell me more detailed?   Thank you very much!

Bagel Kuo

----- Original Message -----
From: "Bill Moffat" 
To: 
Sent: Wednesday, April 10, 2002 11:28 PM
Subject: RE: [mems-talk] Bubble free in oxide etching


> fasheng,
>         sounds like a problem we had when etching aluminum.  We used a
> commercially available tool that applied a vacuum above the etch area and
this
> pulled the bubbles out of the etch solution as soon as they formed.  bill
> Moffat
>
> -----Original Message-----
> From: fasheng zhou [mailto:[email protected]]
> Sent: Tuesday, April 09, 2002 6:26 PM
> To: [email protected]
> Subject: [mems-talk] Bubble free in oxide etching
>
>
> Dear MEMS friends,
>
> I'm trying to eliminate the bubbles in oxide (PSG)
> etching by BOE. But I couldn't find any method up
> to now. I will really appreciate it if you can
> give me some advice.
>
> Thanks.
> Yahoo! Tax Center - online filing with TurboTax
> http://taxes.yahoo.com/
> _______________________________________________
> [email protected] mailing list: to unsubscribe or change your list
> options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
> Hosted by the MEMS Exchange, providers of MEMS processing services.
> Visit us at http://www.mems-exchange.org/
> _______________________________________________
> [email protected] mailing list: to unsubscribe or change your list
> options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
> Hosted by the MEMS Exchange, providers of MEMS processing services.
> Visit us at http://www.mems-exchange.org/