I want to get rid of OTS ( Octadecyltrichlorosilane ) coating layer on silicon
sub.

Specially, I want to know which chemical can remove the OTS SAM.

If you have any suggestion, It's very thanksful for me.

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Nano-Tribology Research Lab.Yonsei University, Korea.
 Ji Chul Yang

 [email protected]

  Have a nice day.
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