IBM did a lot of work on Ohmic Contacts on GaAs. One of the
people involved was Masanori Murakami. Try a lit search on
his name.

-----Original Message-----
From: Liz Shelley [mailto:[email protected]]
Sent: Thursday, April 11, 2002 8:05 AM
To: [email protected]
Subject: [mems-talk] Ohmic Contact to GaAs


I am looking for some information or literature for
making ohmic contact to Gallium Arsenide.
Does anyone know of papers or articles that would give me details for this?
Thank-you for any information
Liz Shelley
Process Development Engineer
MicroMetrics, Inc
Londonderry, NH
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