Hello,

   I'm looking for suppliers of SOI and epi wafers that produce
wafers for MEMS applications. What I'm looking for is: 20 um of
silicon on top of an etch stop (1 um oxide for SOI wafers and 1 um
boron doped layer for the epi).

  Any suggestions would be appreciated.

  Thanks

Ken Westra
Staff Scientist
Alberta Microelectronic Centre
westra@amc.ab.ca