Hallo,
...you can try a surface treatment (e.g OTS-Layer on SU8/Si) to reduced the
adhesion of pdms and a better mold-out.
Jens Tuchscheerer

----- Original Message -----
From: "Xinyu Li" 
To: 
Sent: Thursday, April 11, 2002 11:46 PM
Subject: [mems-talk] Cracks of SU-8 mold


> Dear Colleagues,
>
> I am making and using mold out of SU-8 photoresist. The problem is that
> it cracks after several PDMS replicas. Would you please share what could
> cause this and how to avoid this.
>
> Thanks.
>
> Xinyu Li
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