Hi, jingliu:
If you are designing test mask, you can design a series of comb finger
widths and a series of gap widths, for example from 2um to 10um. Because the
design rule depends on the parameters of DRIE equipment and properties of
SOI materials. So I think it does not have general design rules for
individual DRIE equipment.

Lijie Li

>From: "jingliu" 
>Reply-To: [email protected]
>To: 
>Subject: [mems-talk] design rule for DRIE comb drive?
>Date: Tue, 16 Apr 2002 10:40:18 -0400
>
>Dear College,
>
>I'm designing the test mask for our new DRIE tool. I want to know the
>design
>rule of comb drive?
>
>For SOI wafer with 100um (50um) top Si. Can I use 7um (4um) for width of
>comb finger? Can I get even smaller tolerance for gap between comb fingers,
>say, 2um?
>
>Please give me your comment as soon as possible,
>
>Thanks in advance,
>
>MEMS Lab.
>Mechanical Engineering Dept.
>Univ. of Maryland
>College Park
>MD 20742
>------------------
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>Fax: 301-403-2976
>Email: [email protected]
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