Dear MEMS society,
I want to protect some alignment marks with SU-8 to etch poly-Si in a KOH
bath. What happens with SU-8, is it etched? What's the etch rate?....
How can I protect these alignment marks in poly-Si in the KOH bath?
Thank you for your answer
Regards
Mathieu
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Mathieu Burri
Sensors, Actuators and Microsystems Laboratory
Institute of Microtechnology
University of Neuchbtel
Rue Jacquet Droz 1
CH-2007 Neuchbtel
Switzerland
Tel: +41 32 720 52 78
Fax: +41 32 720 57 11
E-mail: [email protected]
Internet: http://www-samlab.unine.ch
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