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MEMSnet Home: MEMS-Talk: spin coating thicknesses
spin coating thicknesses
2002-04-17
Thomas B. Jones
2002-04-18
[email protected]
2002-04-19
BERAUER,FRANK (HP-Singapore,ex7)
spin coating thicknesses
[email protected]
2002-04-18
Just contact the makers of SU-8 and Polyimide for their suggested spin speeds
for final thickness. Of course that varies depending on the viscosity of the
material and how you dispense i.e. dynamic or static. The companies have the
info you are looking for. Bob Henderson

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