> One would guess that such errors depend on many factors,
> including the material used, etc., etc.
... and temperature, humidity, etc. of the room, material and
roughness of substrate, dispense process, mood of technician/
ngineer, day of the wek/month/year, etc., etc.
In other words: There is no substitute to try and measure!

Greetings,
        Frank Berauer
        Senior R&D Engineer
        Hewlett-Packard Singaporre


-----Original Message-----
From: Thomas B. Jones [mailto:[email protected]]
Sent: Thursday, April 18, 2002 1:11 AM
To: [email protected]
Subject: [mems-talk] spin coating thicknesses


Dear Colleagues:

If one follows the empirical rules for a given spin-coatable material to
achieve some specified thickness, presumably one will achieve this
thickness, plus or minus some absolute and/or percentage amount.  Are there
systematic studies about errors of this type, or does there exist some
accumulated wisdom about it?  One would guess that such errors depend on
many factors, including the material used, etc., etc.  My particular
interest is in polyimide at a nominal10 microns and also SU-8, at nominal 2
microns.

Of course, one can measure the thickness for each substrate coated.  But
had I done that, I would not be posting this plea.

Tom Jones


________________________________________________________
Thomas B. Jones
Professor of Electrical Engineering
University of Rochester
P.O. Box 270126
Rochester, NY  14627-0126    (USA)
phone: 1-585-275-5233   fax: 1-585-273-4919
email: [email protected]
http://www.ece.rochester.edu/~jones
________________________________________________________
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