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MEMSnet Home: MEMS-Talk: pit coverage - with resist
pit coverage - with resist
2002-04-22
xiaohong
2002-04-23
Klauder, Jr., Philip R.
2002-04-23
Bill Moffat
2002-04-23
BERAUER,FRANK (HP-Singapore,ex7)
pit coverage - with resist
xiaohong
2002-04-22
 Hello all - I recently switched from Semiconductor to MEMS and have
never had to worry about the kind of topography I am seeing now - Anyone
have suggestions on a resist and program that could be used for 70um
deep pit coverage No small geometrics to resolve......


 Thanks Mike O' in Alberta

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