Hi,

I'm working on a topology synthesis problem for MEMS devices. My ultimate
objective is to develop a tool which will give the topology of a compliant
mechanism, which can be fabricated by a given surface micromachining process.
The idea is to take in the process sequence as input data, and then perform FEM
& topology optimization to come up with the compliant device, that performs the
required function and is fabricable by the input process.

Though, I am getting favourable results, for the process sequence i am using
right now, i really dont know if i have really got it right, especially from the
manufacturing point of view.What are the manufacturing constraints of a typical
surface micromachining process that really affect the MEMS design at this
stage?Is there any available literature on this subject.Would really welcome
inputs from persons who have worked/are working on such a problem.

Thanks.

DS.


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