Hi,
   Sounds like a job for SU8 from Microchem which I have seen 300 micron thick
or a photosensitive Polymide which can be up to 100 micron thick.  Bill
Moffat

-----Original Message-----
From: xiaohong [mailto:[email protected]]
Sent: Monday, April 22, 2002 3:05 PM
To: [email protected]
Subject: [mems-talk] pit coverage - with resist


 Hello all - I recently switched from Semiconductor to MEMS and have
never had to worry about the kind of topography I am seeing now - Anyone
have suggestions on a resist and program that could be used for 70um
deep pit coverage No small geometrics to resolve......


 Thanks Mike O' in Alberta
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