Hello,

I'm trying to determine the resitivity of the polysilicon in MUMPs.  I know I
can get the resitivitiy from their website, but I need more detailed
information.

Can anyone provide a reference or information on the electrical resitivity over
the range of 300K to 1000K?

Can anyone provide a reference or information about sidewall doping?

Thank you in advance,

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Robert Johnstone
Simon Fraser University
http://www.sfu.ca/~rjohnsto/