Many announcements are now available by World Wide Web in addition to ftp. For
World Wide Web users, the URL is "http://mems.isi.edu/mems".
Announcements:
1. MUMPs7 Reminder
2. Material Issues in Microelectromechanics Session at EMC-TMC
3. CFP: Ninth International IEEE Workshop on MEMS, MEMS-96
4. CFP: Microrobotics and Micromechanical Systems Conference
5. NSF 94-16: Instrument Development for Nano-Science and Engineering
MUMPs7 Reminder
The 7th ARPA-supported Multi-User MEMS Processes (MUMPs) run design deadline is
scheduled for February 27, 1995.
MUMPs is available to all domestic (USA and Canada) industry, academic and
government parties. Participants may purchase a 1 cm x 1 cm die location for
$500 with approximately 15 unreleased die delivered. Layout service and die
releasing are available at an additional cost.
Design rules and process specifications are available from MCNC. Please send
email to [email protected] asking for the MUMPs design rules. Please include your
snailmail address, phone and fax numbers.
***Please note, if you already have a design rule document, be sure it is
revision 3 (10/94).***
For more information about this announcement, please see "/mems/Announcements/
mumps7_announce.txt" in the ISI MEMS Archive ("mems.isi.edu"). For more
information about this announcement, MUMPs, or to reserve a die location, send
email to Dave Koester or call 919-248-1493.
Material Issues in Microelectromechanics Session at EMC-TMC
The Electronic Materials Conference (EMC) of the TMC (The Metals, Minerals, and
Materials Society) is sponsoring special sessions in this area at its 1995
meeting at the University of Virginia, June 26-28. We would like to encourage
you to submit an abstract for this meeting.
This year the EMC will begin holding a session in the topical area of
"Materials Issues in Microelectromechanics," including materials and processes
for micromachining as well as microelectromechanical systems (MEMS).
The abstract deadline is February 15, 1995.
In addition to the talks on materials issues in microelectromechanics, there
are more than 20 different topical area symposia covered at the meeting. For
more information, please see "/mems/Announcements/MEMS_at_TMC_conference.txt"
in the ISI MEMS Archive ("mems.isi.edu"). If you have any questions, please
contact one of the organizers listed below.
Paul J. McWhorter, 505-844-4683, [email protected]
Susan Trolier-McKinstry, 814-863-8348, [email protected]
Michael W. Judy, 617-937-1610, [email protected]
Paul S. Peercy, 505-845-8932, [email protected]
Call for Papers: Ninth International IEEE Workshop on MEMS, MEMS-96
February 11 - 15, 1996 San Diego, California, USA
Deadline for initial abstracts: 15 Sept. 1995.
The IEEE Micro Electro Mechanical Systems (MEMS) is an established Workshop on
design, modeling, fabrication, operation, and application of electromechanical
devices, machines, and systems constructed on the micrometer to millimeter
scale. New fabrication techniques which allow the realization of miniature
electromechanical devices, and the application of these techniques to the
realization of MEMS devices and systems, are an important component of this
Workshop. The purpose of this Workshop is to explore all issues relevant to
MEMS, and to report on recent worldwide research and development efforts in the
field. Participation by potential users of MEMS technology is especially
encouraged.
Basic research areas include fabrication techniques, materials, assembly and
packaging, experimental evaluation, control, design tools, and theory and
simulation.
Application areas include actuators, sensors, optics, systems, robotics,
medical engineering, and manufacturing.
For more information, please see "/mems/Announcements/CFP-IEEE_MEMS96.txt" in
the ISI MEMS Archive ("mems.isi.edu"), or contact the workshop at:
e-mail: [email protected]
Phone: 619-298-3559
FAX: 619-298-3459
Call for Papers: Microrobotics and Micromechanical Systems Conference
Microrobotics and Micromechanical Systems Conference
(Part of SPIE's Intelligent Systems and Advanced Manufacturing Symposium,
October 22-26, 1995, Philadelphia, PA.)
Recent advances in micromechanical systems have spurred the development of
microrobots that may some day perform a variety of useful tasks impossible to
achieve with existing robotic technologies. Armies of microrobots offer the
potential advantages of cost effectiveness, improved performance, mass
production, collective intelligence, and speed over existing macrorobotic
technologies. This conference focuses on recent developments in microrobotics
and enabling technologies in microsensors, microactuators, and micro power
supplies for robots ranging in size from millimeters to centimeters. Emphasis
is placed on new concepts in the design, integration, control, and application
of miniature robots.
Papers are solicited in the following and related areas:
* Mobility and manipulation mechanisms
* Miniature sensing technologies
* Micro power supplies
* System integration
* Robot motion control, fine motion, and collective behaviors
* Multiple robot cooperation and architectures
* Robot benchmarks in realistic environments and task scenarios
* Novel applications: e.g. service, medical, science, surveillance,
agricultural, manufacturing
Paper abstracts should be sent by March 27, 1995. Full papers are due Sept. 25,
1995. For more information, please see "/mems/Announcements/
CFP-mrobotics_MEMS.txt" in the ISI MEMS Archive, or contact Dr. Lynne E. Parker
at "parkerLE.ornl.gov".
NSF 95-16: Instrument Development for Nano-Science and Engineering (NANO95)
National Science Foundation request for proposals
Proposal Deadline: March 17, 1995
The NSF Divisions of Materials Research (DMR), Chemistry (CHE), Physics (PHY),
Astronomical Sciences (AST), Chemical and Transport Systems (CTS), Civil and
Mechanical Structures (CMS), Electrical and Communications Systems (ECS),
Engineering Education and Centers (EEC), Design, Manufacture and Industrial
Innovation (DMII), and Biological Instrumentation and Resources (BIR), are
collaborating in FY 1995 to encourage proposals in the area of instrument
development for nano-science and engineering, which could lead to a new
generation of instruments for manipulation, characterization, synthesis, and
ultimately manufacturing, at the atomic level: Instrument Development for
Nano-Science and Engineering (NANO 95). NANO 95 is intended to provide funds
for the initial assessment of the feasibility and proof-of-concept of
innovative new approaches and techniques. Funded projects generating promising
results will then be encouraged to submit proposals for renewal at levels
suitable for advanced prototyping and development. NANO 95 impacts several
strategic areas supported by NSF, including Advanced Materials and Processing,
Advanced Manufacturing Technologies, Civil Infrastructure Systems, and
Biotechnology.
The focus of NANO 95 is on new proposals for the development of new instruments
that will lead to new discoveries and advance atomic scale measurements of
atoms, clusters, nanoparticles, and nanostructured materials beyond current
capability. The intent is to impact the areas of manufacturing, synthesis, and
fabrication on the nanometer scale, and to complement computational efforts
where atomistic modeling at the microstructural level is emphasized. It is
anticipated that the most promising proposals will be interdisciplinary
contributions combining expertise in physics, chemistry, materials science,
biology and engineering.
For more information send e-mail requests to "[email protected]." In your request
include the NSF publication number and title, number of copies, your name, and
a complete mailing address. Publications should be received within three weeks
after receipt of your order.