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MEMSnet Home: MEMS-Talk: Porosity of Porous silicon
Porosity of Porous silicon
2002-04-29
Frank Fan
Porosity of Porous silicon
Frank Fan
2002-04-29
Hello everyone:

Is there anybody who can tell me the porosity of these
samples?

HF(46wt%):Ethanol=1:1.
p-type silicon 1-10Ohm*cm
Current density: 10mA/cm2, 20mA/cm2, 30mA/cm2 and
40mA/cm2.

Can you tell me the porosity of the four samples?

Or, is there any reference books or paper listing some
tables of porosities?

Thank you very much!

Frank
April 29, 2002
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