Hi,

I am a lead designer of the MEMS team at Lucent Technologies
working on the LambdaRouter (tm) micromirrors, along with other MEMS devices.

First, LambdaRouter is a Lucent, not Agere, product.
[http://www.lucent.com/pressroom/lambda.html]

The mirrors for it are designed by out team at Lucent's Bell Laboratories.
[http://www.bell-labs.com/org/physicalsciences/projects/mems/mems.html]

The high resolution colorized SEM pictures of mirrors are available through
http://www.bell-labs.com/org/physicalsciences/projects/mems/mems3.html
(please click on 'crossconnect').

You can learn more about those mirrors from, for example:
V. A. Aksyuk, F. Pardo, C. A. Bolle, S. Arney, C. R. Giles, D. J. Bishop,
"Lucent Microstar ^(TM) Micromirror Array
Technology for Large Optical Crossconnects", Proc. of SPIE, Vol. 4178, pp.
320-324 (2000)

We have multiple other papers in the field of optical MEMS.
More detailed information specific to the micromirror fabrication is not
available
to the general public at this time, however we have recently submitted a
longer and more detailed paper on this subject for publication in the
Journal of Lightwave Technologies.

Hope this helps!

Vladimir Aksyuk.


> Message: 12
> Date: Tue, 30 Apr 2002 12:33:04 +0200 (CEST)
> From: =?iso-8859-1?q?sou=20zou?= 
> To: [email protected]
> Subject: [mems-talk] Lamda Router micromirror for optical switches
> Reply-To: [email protected]
>
> Hi mems-talk members,
> I am a post-doc research fellow and I am looking for an optimal process flow
allowing me to get the compromise reliability/cost effectiveness to design a
double tiltable (2-DOF) micromirror. I got some bibliography about diffrent
designs but nothing special about the optical switches micromirrors (known as
Lamda Router) TM of Agere, formerly was Lucent Technologies microelectronics
division. I know only that it is difficult or may be impossible to make this
device under some standard technological processes like MUMP's or SOI-based
process-flows. In fact, the only informations I got through the web includes
only some general technical informations and advertisement about the device.
> Does anyone, please, knows about the process flow, the technology (materials,
deposition methods, ...), or any reliable informations (papers, articles on
line) about this switches, that i can compare the processes together ?
>
> Any help would be very gratefull and thanks in advance everyone.
>
> Sofiane Zairi