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MEMSnet Home: MEMS-Talk: Sputtering gold onto Si3N4
Sputtering gold onto Si3N4
2002-04-30
Jason Teng
Sputtering gold onto Si3N4
Jason Teng
2002-04-30
Hi everyone, I have a question to ask.

I am going to sputter gold on silicon nitride.  What
is the level of adherence of Au to Si3N4?

I would probably need an intermediate layer such as Ni
to improve adherence.

Is it possible to localise the gold deposition?  I was
thinking of using a metal cover or any other
protective method.  I've thought of using resist but
this is something I would like to avoid if possible.

Any tips?
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