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MEMSnet Home: MEMS-Talk: Etching of Vias
Etching of Vias
2002-05-01
iain.watson@baesystems.com
2002-05-01
Bill Moffat
Etching of Vias
iain.watson@baesystems.com
2002-05-01
Dear All,

I have a problem trying to find a way of detecting the end point of a via
etch which has a 1um layer of Cr on top of a  2um layer of SiO2 to be
etched.  We are currently relying on a visual inspection to determine the
end point.  Rather than just rely on visual inspection does anyone know of
any other methods that might make this process more robust without
installing a end point detector on our etcher?.

hope you can give me some ideas,

many thanks,

Iain Watson.



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