Noah,
     No experience with BCB starbursts but lots of experience with resist
spinning star bursts give me a call 408 954 8353 and I will unload on you.  Be
warned I will also talk at length about our BCB baking oven  Bill Moffat

-----Original Message-----
From: Noah Clay [mailto:[email protected]]
Sent: Monday, April 29, 2002 4:27 PM
To: [email protected]
Cc: [email protected]
Subject: [mems-talk] Spinning BCB on Nitride.


I'm having difficulty spinning BCB on nitride.  There appears to be a
consistent starburst or comet pattern on the wafer despite following the
manufacturer's instructions for dispensing the adhesion promoter and BCB
itself.  I'm using an eppendorf and dispensing until the wafer is
covered in the slow spin stage at 100RPM (I've tried not coating the
wafer completely, but the problem seems exacerbated in those instances).
I'm also dispensing at a level very close to the wafer and very
well-centered.  I've read that the comet pattern usually arises from air
bubbles in the BCB, but I've taken pains to allow settling prior to
dispense.  HELP!

Noah Clay
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