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MEMSnet Home: MEMS-Talk: Contact Angles of Semiconductor Films
Contact Angles of Semiconductor Films
2002-05-03
Tariq M. Haniff
2002-05-06
Bill Moffat
Contact Angles of Semiconductor Films
Tariq M. Haniff
2002-05-03
Dear Members,

I am looking for a good summary of hydrophobicity/hydrophilicity of films
compatible with semiconductor processing.
Films like, thermal oxide, LTO, BPSG, Si3N4, etc. Specific contact angle would
be great. Can anyone point me in the right direction?

Thanks in advance,

Tariq M. Haniff
Genospectra, Inc
6519 Dumbarton Circle
Fremont, CA 94555
510-818-2600

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