Dear all,

We have access to a STS DRIE etcher and would like to create mirror-like
finish on the sidewalls with a depth of a few microns.   What would be the
sidewall smoothness limit with the STS etcher in terms of nano meters based
on your experiences?    What are the tricks/recipes to create such a smooth
sidewall?  If the sidewall is not smooth enough after the DRIE etching, what
is the best treatment one has to further improve the sidewall roughness?
Could you share the treatment recipe or point me to some good references?
Thanks a lot!

Nancy Jia

Nancy Jia
Wilson Center for Research and Technology
Xerox Corporation
800 Phillips Rd 147-16C
Webster, NY 14580
Phone: 585-422-7374
Fax: 585-422-0202
njia@crt.xerox.com