MEMS-talk

News	MEMSnet Home: MEMS-Talk: how to deposit PZT how to deposit PZT 2002-05-09 David Yen 2002-05-10 Haigh, Richard 2002-05-10 RobDavis 2002-05-13 Gurvinderjit Singh 2002-05-14 Christopher F. Blanford tin on copper oxide 2002-05-14 Robert Dean PLZT robotics 2002-05-22 Gurvinderjit Singh 2002-05-10 Michael Barger 2002-05-10 lucp1429 2002-05-12 TEL Klaus Beschorner 2002-05-13 Haigh, Richard Gold film 2002-05-20 Gurvinderjit Singh how to deposit PZT David Yen 2002-05-09 Dear all, Does anybody have experience or idea of depositing PZT, especially by sputtering? Thanks a lot. David reply
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