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MEMSnet Home: MEMS-Talk: (110) wafer etching
(110) wafer etching
1996-09-12
igal cherkow
(110) wafer etching
igal cherkow
1996-09-12
I  will appreciate if you can refer me to some one
who knows about (110) wafer especialy etching with KOH and SiO2 mask.

thanks,

Igal Chertkow.


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