Elipsometry and Secondary Ion Mass Spectrometry

-Mike

>>> [email protected] 05/14/02 14:54 PM >>>
Dear all,
 I have prepared multilayers of SiOxNy and MgF2 by
electron beam physical vapor deposition technique.I
would like to know different characterization methods
of compositional and optical properties for these
multilayers.
Thanks in advance

Yours
K.C.Mohite

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K.C.Mohite                          Ph.9120-5695201(O)
School Of Energy Studies               9120-7291872(R)
Department of Physics
University of Pune
PUNE-411 007
INDIA
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