Hi,
     STS confirms the temperature on the top of the wafer is below 60 degree.
good luck

----- Original Message -----
From: "Jia Zhou" 
To: 
Sent: Wednesday, May 15, 2002 8:20 PM
Subject: [mems-talk] The Temperature of DRIE


> Who knows the temperature in DRIE when silicon is deep-etched, say 500microns?
>
> Thanks.
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