1).  Check out your local public and university libraries... most will have
paid for on-line search databases (like Inspec) and will allow you to use
them while in the library.

2).  If you need to do searches from you office, you (or you company) can
subscribe to one of many services which have paid for access to the
databases you wish to search.  Most also offer document delivery services
so you can have any articles you find on-line sent directly to you.  Two
possibilities are: Dialog (www.dialog.com) and STN (info.cas.org/stn.html).
Your local library may have other suggestions as well.

Using these resources is far better than sending trivial questions to the
mems@isi distribution... your MEMS collegues will thank you.

  David Borkholder
  Stanford University                     Office: (415) 725-6139
  CIS 205X                                Lab:    (415) 723-7252
  Stanford, CA 94305-4075                 Fax:    (415) 725-9020

[I will add this information to the MEMS-EDG guidelines.  I'm also
collecting reference materials and FAQ lists to assist in answering
many of these questions directly.
Craig Milo Rogers -- MEMS Clearinghouse]